Growth, stability and decomposition of Mg2Si ultra-thin films on Si (100)

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Growth, stability and decomposition of Mg 2 Si ultra-thin films on Si (100)

Using Auger Electron Spectroscopy (AES), Scanning Tunneling Microscopy/Spectroscopy (STM/STS) and Low Energy Electron Diffraction (LEED), we report an in-situ study of amorphous magnesium silicide (Mg2Si) ultra-thin films grown by thermally enhanced solid-phase reaction of few Mg monolayers deposited at room temperature (RT) on a Si(100) surface. Silicidation of magnesium films can be achieved ...

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ژورنال

عنوان ژورنال: Applied Surface Science

سال: 2018

ISSN: 0169-4332

DOI: 10.1016/j.apsusc.2017.09.027